Invention Grant
US08169022B2 Vertical junction field effect transistors and diodes having graded doped regions and methods of making 有权
具有渐变掺杂区域的垂直结型场效应晶体管和二极管及其制造方法

  • Patent Title: Vertical junction field effect transistors and diodes having graded doped regions and methods of making
  • Patent Title (中): 具有渐变掺杂区域的垂直结型场效应晶体管和二极管及其制造方法
  • Application No.: US12818232
    Application Date: 2010-06-18
  • Publication No.: US08169022B2
    Publication Date: 2012-05-01
  • Inventor: Lin ChengMichael Mazzola
  • Applicant: Lin ChengMichael Mazzola
  • Applicant Address: US MS Jackson
  • Assignee: SS SC IP, LLC
  • Current Assignee: SS SC IP, LLC
  • Current Assignee Address: US MS Jackson
  • Agency: Morris, Manning & Martin, LLP
  • Agent Christopher W. Raimund
  • Main IPC: H01L29/66
  • IPC: H01L29/66
Vertical junction field effect transistors and diodes having graded doped regions and methods of making
Abstract:
Semiconductor devices and methods of making the devices are described. The devices can be junction field-effect transistors (JFETs) or diodes such as junction barrier Schottky (JBS) diodes or PiN diodes. The devices have graded p-type semiconductor layers and/or regions formed by epitaxial growth. The methods do not require ion implantation. The devices can be made from a wide-bandgap semiconductor material such as silicon carbide (SiC) and can be used in high temperature and high power applications.
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