Invention Grant
US08168691B2 Vinyl ether resist formulations for imprint lithography and processes of use 有权
乙烯基醚抗蚀剂配方用于压印光刻和使用过程

Vinyl ether resist formulations for imprint lithography and processes of use
Abstract:
Coating compositions suitable for UV imprint lithographic applications are disclosed that include at least one vinyl ether crosslinker having at least two vinyl ether groups; at least one diluent comprising a monofunctional vinyl ether compound; and at least one photoacid generator soluble in a selected one or both of the at least one monofunctional ether compound and the at least one vinyl ether compound, wherein the at least one monofunctional ether compound and the at least one vinyl ether compound are free from fluorine and silicon substituents. Also disclosed are imprint processes.
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