Invention Grant
- Patent Title: Semiconductor chip and method for fabricating the same
- Patent Title (中): 半导体芯片及其制造方法
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Application No.: US12534885Application Date: 2009-08-04
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Publication No.: US08168527B2Publication Date: 2012-05-01
- Inventor: Mou-Shiung Lin , Chiu-Ming Chou
- Applicant: Mou-Shiung Lin , Chiu-Ming Chou
- Applicant Address: TW Hsinchu
- Assignee: Megica Corporation
- Current Assignee: Megica Corporation
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L21/768
- IPC: H01L21/768

Abstract:
A semiconductor chip includes a silicon substrate, a first dielectric layer over said silicon substrate, a metallization structure over said first dielectric layer, wherein said metallization structure comprises a first metal layer and a second metal layer over said first metal layer, a second dielectric layer between said first and second metal layers, a passivation layer over said metallization structure and over said first and second dielectric layers, an opening in said passivation layer exposing a pad of said metallization structure, a polymer bump over said passivation layer, wherein said polymer bump has a thickness of between 5 and 25 micrometers, an adhesion/barrier layer on said pad exposed by said opening, over said passivation layer and on a top surface and a portion of sidewall(s) of said polymer bump, a seed layer on said adhesion/barrier layer; and a third metal layer on said seed layer.
Public/Granted literature
- US20090291554A1 SEMICONDUCTOR CHIP AND METHOD FOR FABRICATING THE SAME Public/Granted day:2009-11-26
Information query
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