Invention Grant
- Patent Title: Method for manufacturing electrophotographic photosensitive member
- Patent Title (中): 电子照相感光构件的制造方法
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Application No.: US12505698Application Date: 2009-07-20
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Publication No.: US08168365B2Publication Date: 2012-05-01
- Inventor: Tomohito Ozawa , Kazuyoshi Akiyama , Yuu Nishimura
- Applicant: Tomohito Ozawa , Kazuyoshi Akiyama , Yuu Nishimura
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2008-192057 20080725; JP2009-160400 20090707
- Main IPC: G03G5/147
- IPC: G03G5/147

Abstract:
The present invention provides a method for manufacturing an electrophotographic photosensitive member including a step of forming a first surface layer and a second surface layer of the electrophotographic photosensitive member by supplying a source gas into a reaction vessel so that C2/S2, which are respectively flow rates of CH4 and SiH4 flowing when the second surface layer is formed, can be 3 or more and 25 or less, and C1/S1, which are respectively flow rates of CH4 and SiH4 flowing when the first surface layer is formed, can be C2/S2 or more but 60 or less. The method includes an additional step of adjusting the high-frequency power so that P2>P1 can be satisfied, which are high-frequency powers respectively when the second surface layer is formed and when the first surface layer is formed, and C/(Si+C) of the first surface layer and C/(Si+C) of the second surface layer can be 0.50 or more and 0.80 or less.
Public/Granted literature
- US20100021837A1 METHOD FOR MANUFACTURING ELECTROPHOTOGRAPHIC PHOTOSENSITIVE MEMBER Public/Granted day:2010-01-28
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