Invention Grant
US08168353B2 Method of curing color filter for electronic display using electron-beam and method of fabricating color filter for electronic display using the same 有权
使用电子束固化用于电子显示器的滤色器的方法和使用其制造用于电子显示器的滤色器的方法

Method of curing color filter for electronic display using electron-beam and method of fabricating color filter for electronic display using the same
Abstract:
Disclosed herein is a method of curing a color filter for an electronic display using an electron beam at low temperature. A conventional method of curing the color filter by thermal-heating is not suitable for a process of fabricating next generation flexible displays. In the method of the invention, after a color resist pattern is formed on a substrate, the resist is cured by an electron beam at 100° C. or less. Hence, the method can minimize damage of the substrate while facilitating dimension control of the color pattern and achieving precision of a fine pattern. A method of fabricating a color filter for an electronic display using the method is also disclosed.
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