Invention Grant
US08168045B2 Apparatus for an enhanced magnetic plating method 有权
用于增强磁电镀方法的装置

Apparatus for an enhanced magnetic plating method
Abstract:
An apparatus for plating a magnetic film on a substrate includes: a track including a plurality of stopping points along the track; a permanent magnet placed on the track such that the permanent magnet can be moved along the track towards and away from the stopping points; at least one plating tank positioned on the stopping point; and a removable high permeability iron flux concentrator inserted into gaps between the substrate and inside walls of the plating tank, substantially surrounding the substrate and extending around and under the substrate.
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