Invention Grant
- Patent Title: Flow sensor and manufacturing method therefor
- Patent Title (中): 流量传感器及其制造方法
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Application No.: US12191907Application Date: 2008-08-14
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Publication No.: US08166814B2Publication Date: 2012-05-01
- Inventor: Shinichi Ike , Hiroshi Hatakeyama , Satoshi Tsuchiya
- Applicant: Shinichi Ike , Hiroshi Hatakeyama , Satoshi Tsuchiya
- Applicant Address: JP
- Assignee: Yamatake Corporation
- Current Assignee: Yamatake Corporation
- Current Assignee Address: JP
- Agency: Cantor Colburn LLP
- Priority: JP2007-244545 20070920; JP2007-249619 20070926
- Main IPC: G01F1/68
- IPC: G01F1/68 ; H01C17/06

Abstract:
A flow sensor may be formed by bonding a sensor chip formed with a flow rate detecting part and a flow path-forming member that is provided on the sensor chip and is formed with a flow path for a fluid flowing in the flow rate detecting part to each other on the upper surface of a substrate. The flow path-forming member may be formed by bonding a transparent first flow path forming member and a second flow path-forming member to each other. The first flow path forming member has a plate shape, and is provided with an inflow port and a outflow port for the fluid to be measured, and the second flow path forming member has a plate shape, and is provided with a through hole that forms the flow path along the flow of the fluid flowing along the flow rate detecting part.
Public/Granted literature
- US20090078040A1 FLOW SENSOR AND MANUFACTURING METHOD THEREFOR Public/Granted day:2009-03-26
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