Invention Grant
- Patent Title: Perpendicular magnetic recording head having a pole tip formed with a CMP uniformity structure
- Patent Title (中): 具有形成有CMP均匀结构的极尖的垂直磁记录头
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Application No.: US11871672Application Date: 2007-10-12
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Publication No.: US08149536B1Publication Date: 2012-04-03
- Inventor: Danning Yang , Yingjian Chen , Brant Nease , Kyusik Sin
- Applicant: Danning Yang , Yingjian Chen , Brant Nease , Kyusik Sin
- Applicant Address: US CA Fremont
- Assignee: Western Digital (Fremont), LLC
- Current Assignee: Western Digital (Fremont), LLC
- Current Assignee Address: US CA Fremont
- Main IPC: G11B5/127
- IPC: G11B5/127

Abstract:
A method and system for manufacturing a perpendicular magnetic recording head is disclosed. The method and system include providing a chemical mechanical planarization (CMP) uniformity structure having an aperture therein and forming a perpendicular magnetic recording pole within the aperture. The CMP uniformity structure may include a CMP barrier layer. The method and system further include fabricating an insulator after formation of the perpendicular magnetic recording pole and performing a CMP to remove a portion of the insulator, expose a portion of the perpendicular magnetic recording pole and planarize an exposed surface of the perpendicular magnetic recording head.
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