Invention Grant
US08149536B1 Perpendicular magnetic recording head having a pole tip formed with a CMP uniformity structure 有权
具有形成有CMP均匀结构的极尖的垂直磁记录头

Perpendicular magnetic recording head having a pole tip formed with a CMP uniformity structure
Abstract:
A method and system for manufacturing a perpendicular magnetic recording head is disclosed. The method and system include providing a chemical mechanical planarization (CMP) uniformity structure having an aperture therein and forming a perpendicular magnetic recording pole within the aperture. The CMP uniformity structure may include a CMP barrier layer. The method and system further include fabricating an insulator after formation of the perpendicular magnetic recording pole and performing a CMP to remove a portion of the insulator, expose a portion of the perpendicular magnetic recording pole and planarize an exposed surface of the perpendicular magnetic recording head.
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