Invention Grant
US08149386B2 Illumination optical system, exposure apparatus using the same and device manufacturing method 有权
照明光学系统,使用相同的曝光装置和装置制造方法

Illumination optical system, exposure apparatus using the same and device manufacturing method
Abstract:
An illumination optical system includes a pair of fly-eye mirrors configured to receive light from a light source, a first condenser configured to condense light from the pair of fly-eye mirrors, a reflection type integrator configured to receive light from the first condenser, the reflection type integrator including a plurality of cylindrical reflective surfaces having parallel generating line directions, an aperture stop arranged perpendicular to the generating line direction, and a second condenser configured to superpose on an illuminated surface luminous fluxes from a plurality of cylindrical reflective surfaces of the reflection type integrator.
Information query
Patent Agency Ranking
0/0