Invention Grant
- Patent Title: Exposure apparatus and correction apparatus
- Patent Title (中): 曝光装置和校正装置
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Application No.: US12246158Application Date: 2008-10-06
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Publication No.: US08149380B2Publication Date: 2012-04-03
- Inventor: Hiromi Suda
- Applicant: Hiromi Suda
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Dvivision
- Priority: JP2007-264590 20071010
- Main IPC: G03B27/68
- IPC: G03B27/68 ; G03B27/54 ; G03B27/42 ; G03B27/52

Abstract:
An exposure apparatus is configured to expose a pattern of an original on a substrate by using light from a light source. The exposure apparatus includes an illumination optical system configured to illuminate the original by polarized light by using the light from the light source, and a correction unit configured to correct misalignment of the optical axis of the light from the light source and the optical axis of the illumination optical system. The correction unit includes a first lens and a deflecting member, the first lens can move in a direction perpendicular to an optical axis of the lens, and a deflecting direction of the light deflected by the deflecting member is variable.
Public/Granted literature
- US20090097005A1 EXPOSURE APPARATUS AND CORRECTION APPARATUS Public/Granted day:2009-04-16
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