Invention Grant
- Patent Title: Techniques for changing temperature of a platen
- Patent Title (中): 改变压板温度的技术
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Application No.: US12132939Application Date: 2008-06-04
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Publication No.: US08149256B2Publication Date: 2012-04-03
- Inventor: Roger B. Fish , Samuel M. Barsky , Scott C. Holden , Arthur P. Riaf , Steven M. Anella
- Applicant: Roger B. Fish , Samuel M. Barsky , Scott C. Holden , Arthur P. Riaf , Steven M. Anella
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/08
- IPC: H01J37/08
Abstract:
Techniques for changing temperature of a platen are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for changing temperature of a platen comprising a platen and one or more movable thermal pads comprising one or more thermal fluid channels to carry a thermal fluid configured to affect a temperature of the platen.
Public/Granted literature
- US20090303306A1 TECHNIQUES FOR CHANGING TEMPERATURE OF A PLATEN Public/Granted day:2009-12-10
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