Invention Grant
- Patent Title: Micromachined piezoelectric ultrasound transducer arrays
- Patent Title (中): 微加工压电超声换能器阵列
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Application No.: US13082958Application Date: 2011-04-08
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Publication No.: US08148877B2Publication Date: 2012-04-03
- Inventor: Xiaoning Jiang , Wesley S. Hackenberger , Kevin A. Snook
- Applicant: Xiaoning Jiang , Wesley S. Hackenberger , Kevin A. Snook
- Applicant Address: US PA State College
- Assignee: TRS Technologies, Inc.
- Current Assignee: TRS Technologies, Inc.
- Current Assignee Address: US PA State College
- Agency: McNees Wallace & Nurick LLC
- Main IPC: H01L41/04
- IPC: H01L41/04

Abstract:
A piezoelectric composite micromachined ultrasound transducer including single and multilayer 1-D and 2-D arrays having through-wafer-vias (TWVs) that significantly decreased electrical impedance per element, and hence the improved electrical impedance matching to T/R electronics and improved signal to noise ratio is disclosed. The TWVs facilitate integrated interconnection in single element transducers (positive and negative contact on the same side) and array transducers (contact pads array for integration with T/R switches and/or pre-amplifier circuits).
Public/Granted literature
- US20110215677A1 MICROMACHINED PIEZOELECTRIC ULTRASOUND TRANSDUCER ARRAYS Public/Granted day:2011-09-08
Information query
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