Invention Grant
- Patent Title: Microactuator having multiple degrees of freedom
- Patent Title (中): 具有多重自由度的微型制动器
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Application No.: US11817378Application Date: 2006-04-13
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Publication No.: US08148874B2Publication Date: 2012-04-03
- Inventor: Huikai Xie , Shane T. Todd
- Applicant: Huikai Xie , Shane T. Todd
- Applicant Address: US FL Gainesville
- Assignee: University of Florida Research Foundation, Inc.
- Current Assignee: University of Florida Research Foundation, Inc.
- Current Assignee Address: US FL Gainesville
- Agency: Thomas, Kayden, Horstemeyer & Risley, LLP
- International Application: PCT/US2006/014189 WO 20060413
- International Announcement: WO2006/110908 WO 20061019
- Main IPC: H02N10/00
- IPC: H02N10/00 ; H02N1/00

Abstract:
A MEMS vertical displacement device for vertically displacing and tilting a vertically displaceable platform. The vertically displaceable platform may be displaced using a plurality of recurve actuators configured to provide vertical displacement without horizontal movement. The vertically displaceable platform may be tilted about two axes to yield tilting that is advantageous in numerous applications. The recurve actuators may be thermal, piezoelectric or formed from other appropriate materials.
Public/Granted literature
- US20090261688A1 MICROACTUATOR HAVING MULTIPLE DEGREES OF FREEDOM Public/Granted day:2009-10-22
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