Invention Grant
- Patent Title: Compounds for forming metal nitrides
- Patent Title (中): 用于形成金属氮化物的化合物
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Application No.: US12438451Application Date: 2007-08-30
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Publication No.: US08148564B2Publication Date: 2012-04-03
- Inventor: Charles H. Winter
- Applicant: Charles H. Winter
- Applicant Address: US MI Detroit
- Assignee: Wayne State University
- Current Assignee: Wayne State University
- Current Assignee Address: US MI Detroit
- Agency: Brooks Kushman P.C.
- International Application: PCT/US2007/077261 WO 20070830
- International Announcement: WO2008/028053 WO 20080306
- Main IPC: C07F11/00
- IPC: C07F11/00
Abstract:
Nitride forming precursors are heated to form a metal nitride on a substrate. In some variations, the precursors are contacted with the substrate which has previously been heated to a sufficient temperature to form a nitride film. Precursors to tungsten and molybdenum nitride are provided.
Public/Granted literature
- US20100239765A1 COMPOUNDS FOR FORMING METAL NITRIDES Public/Granted day:2010-09-23
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