Invention Grant
- Patent Title: Method for manufacturing a micromechanical component having a volume-elastic medium and micromechanical component
- Patent Title (中): 用于制造具有体积弹性介质和微机械部件的微机械部件的方法
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Application No.: US12270087Application Date: 2008-11-13
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Publication No.: US08148187B2Publication Date: 2012-04-03
- Inventor: Wolf-Ingo Ratzel , Christian Ohl , Juergen Kurle
- Applicant: Wolf-Ingo Ratzel , Christian Ohl , Juergen Kurle
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102007057441 20071129
- Main IPC: H01L23/24
- IPC: H01L23/24
Abstract:
A method for manufacturing a micromechanical component is described, the micromechanical component having a medium. The medium has settable and changeable volume-elastic properties and generally completely encloses a sensor module and/or a module housing. The medium preferably has a low-pass response.
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