Invention Grant
- Patent Title: Ink jet recording head and manufacturing method of the same
- Patent Title (中): 喷墨记录头及其制造方法相同
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Application No.: US11680821Application Date: 2007-03-01
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Publication No.: US08148049B2Publication Date: 2012-04-03
- Inventor: Hiroyuki Murayama , Junichi Kobayashi , Yoshinori Tagawa , Kenji Fujii , Hideo Tamura , Taichi Yonemoto , Keiji Watanabe
- Applicant: Hiroyuki Murayama , Junichi Kobayashi , Yoshinori Tagawa , Kenji Fujii , Hideo Tamura , Taichi Yonemoto , Keiji Watanabe
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2006-059536 20060306
- Main IPC: G03C5/00
- IPC: G03C5/00

Abstract:
A manufacturing method of an ink jet recording head includes steps of forming a liquid flow path mold material of a soluble resin on a substrate on which an energy generating element is formed, the energy generating element being configured to generate energy for use in discharging ink; forming a coating resin layer of a negative photosensitive resin on the substrate on which the mold material is formed; exposing and developing the coating resin layer to form an ink discharge port in the coating resin layer; and dissolving and removing the mold material to form a liquid flow path. During the exposing of the coating resin layer, a total amount of exposure energy per unit area applied to an exposure region other than a region of the coating resin layer positioned above the mold material is greater than that of exposure energy per unit area applied to the region of the coating resin layer positioned above the mold material.
Public/Granted literature
- US20070207414A1 INK JET RECORDING HEAD AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2007-09-06
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