Invention Grant
- Patent Title: Positive photosensitive composition
- Patent Title (中): 正光敏组合物
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Application No.: US12608567Application Date: 2009-10-29
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Publication No.: US08148044B2Publication Date: 2012-04-03
- Inventor: Shuhei Yamaguchi , Tomotaka Tsuchimura , Yuko Tada
- Applicant: Shuhei Yamaguchi , Tomotaka Tsuchimura , Yuko Tada
- Applicant Address: JP Tokyo
- Assignee: Fujifilm Corporation
- Current Assignee: Fujifilm Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2008-282610 20081031; JP2008-301006 20081126
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20 ; G03F7/30 ; C07C309/15

Abstract:
A positive photosensitive composition includes at least one compound that when exposed to actinic rays or radiation, generates any of the sulfonic acids of general formula (I) and a resin whose solubility in an alkali developer is increased by the action of an acid, wherein each of X1 and X2 independently represents a fluorine atom or a fluoroalkyl group, R1 represents a group with a polycyclic structure, provided that the polycyclic structure may have a substituent, and R2 represents a hydrogen atom, a chain alkyl group, a monocyclic alkyl group, a group with a polycyclic structure or a monocyclic aryl group, provided that each of the chain alkyl group, monocyclic alkyl group, polycyclic structure and monocyclic aryl group may have a substituent, and provided that R1 and R2 may be bonded to each other to thereby form a polycyclic structure.
Public/Granted literature
- US20100136479A1 POSITIVE PHOTOSENSITIVE COMPOSITION Public/Granted day:2010-06-03
Information query
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