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US08147901B2 Method of manufacturing gas sensor 有权
制造气体传感器的方法

Method of manufacturing gas sensor
Abstract:
Provided herein is a method of manufacturing a gas sensor. The method includes forming electrodes on a surface of a substrate, manufacturing a paste having a complex of CNTs and a metal-ligand complex comprising a metal that has gas adsorption selectivity for specific gases, coating the paste on the substrate to cover the electrodes, patterning the paste by a photolithography process, and reducing the metal-ligand complex included in the patterned paste.
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