Invention Grant
- Patent Title: Method of manufacturing gas sensor
- Patent Title (中): 制造气体传感器的方法
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Application No.: US11742639Application Date: 2007-05-01
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Publication No.: US08147901B2Publication Date: 2012-04-03
- Inventor: Sung-ouk Jung , Myung-sup Jung , Soo-suk Lee
- Applicant: Sung-ouk Jung , Myung-sup Jung , Soo-suk Lee
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2006-0083658 20060831
- Main IPC: B05D5/12
- IPC: B05D5/12

Abstract:
Provided herein is a method of manufacturing a gas sensor. The method includes forming electrodes on a surface of a substrate, manufacturing a paste having a complex of CNTs and a metal-ligand complex comprising a metal that has gas adsorption selectivity for specific gases, coating the paste on the substrate to cover the electrodes, patterning the paste by a photolithography process, and reducing the metal-ligand complex included in the patterned paste.
Public/Granted literature
- US20080113301A1 METHOD OF MANUFACTURING GAS SENSOR Public/Granted day:2008-05-15
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