Invention Grant
US08147618B2 Device and method for liquid treating disc-like articles 有权
用于液体处理盘状制品的装置和方法

  • Patent Title: Device and method for liquid treating disc-like articles
  • Patent Title (中): 用于液体处理盘状制品的装置和方法
  • Application No.: US12280559
    Application Date: 2007-02-07
  • Publication No.: US08147618B2
    Publication Date: 2012-04-03
  • Inventor: Thomas Passegger
  • Applicant: Thomas Passegger
  • Applicant Address: AT Villach
  • Assignee: Lam Research AG
  • Current Assignee: Lam Research AG
  • Current Assignee Address: AT Villach
  • Agency: Young & Thompson
  • Priority: ATA337/2006 20060228
  • International Application: PCT/EP2007/051174 WO 20070207
  • International Announcement: WO2007/099021 WO 20070907
  • Main IPC: B08B3/04
  • IPC: B08B3/04
Device and method for liquid treating disc-like articles
Abstract:
Herein disclosed is a device and a method for liquid treatment of a disc-like article comprising rotating a disc-like article, dispensing liquid onto the disc-like article when rotated, collecting liquid, which is flung off the disc-like article when rotated, providing a plate arranged parallel to the disc-like article and facing the disc-like article when rotated, and directing gas parallel to the plate across the plate.
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