Invention Grant
- Patent Title: Device and method for liquid treating disc-like articles
- Patent Title (中): 用于液体处理盘状制品的装置和方法
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Application No.: US12280559Application Date: 2007-02-07
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Publication No.: US08147618B2Publication Date: 2012-04-03
- Inventor: Thomas Passegger
- Applicant: Thomas Passegger
- Applicant Address: AT Villach
- Assignee: Lam Research AG
- Current Assignee: Lam Research AG
- Current Assignee Address: AT Villach
- Agency: Young & Thompson
- Priority: ATA337/2006 20060228
- International Application: PCT/EP2007/051174 WO 20070207
- International Announcement: WO2007/099021 WO 20070907
- Main IPC: B08B3/04
- IPC: B08B3/04

Abstract:
Herein disclosed is a device and a method for liquid treatment of a disc-like article comprising rotating a disc-like article, dispensing liquid onto the disc-like article when rotated, collecting liquid, which is flung off the disc-like article when rotated, providing a plate arranged parallel to the disc-like article and facing the disc-like article when rotated, and directing gas parallel to the plate across the plate.
Public/Granted literature
- US20090000645A1 Device and Method for Liquid Treating Disc-Like Articles Public/Granted day:2009-01-01
Information query
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