Invention Grant
US08147032B2 Liquid droplet ejection apparatus, method for manufacturing electro-optic device, electro-optic device, and electronic equipment 有权
液滴喷射装置,电光装置的制造方法,电光装置和电子设备

Liquid droplet ejection apparatus, method for manufacturing electro-optic device, electro-optic device, and electronic equipment
Abstract:
A liquid droplet ejection apparatus performs a drawing operation on a workpiece set on a set table by driving the ejection of a functional liquid droplet ejection head in a head unit while moving the head unit in a main scanning direction relative to the set table facing a drawing area by an X-axis table. The liquid droplet ejection apparatus includes a periodic flushing unit which is disposed on a main scan moving axis at a position offset from the drawing area towards the main scanning direction and which receives forcible ejection from the functional liquid droplet ejection head during non-drawing time and a pre-drawing flushing unit which is disposed adjacent to the set table and faces the drawing area and which receives forcible ejection from the functional liquid droplet ejection head performed immediately before starting the drawing operation.
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