Invention Grant
US08146424B2 Systems and methods for an inertial sensor suspension that minimizes proof mass rotation
有权
用于惯性传感器悬架的系统和方法,其最小化了质量旋转
- Patent Title: Systems and methods for an inertial sensor suspension that minimizes proof mass rotation
- Patent Title (中): 用于惯性传感器悬架的系统和方法,其最小化了质量旋转
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Application No.: US12336204Application Date: 2008-12-16
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Publication No.: US08146424B2Publication Date: 2012-04-03
- Inventor: Burgess R. Johnson , Jonathan M. Engel
- Applicant: Burgess R. Johnson , Jonathan M. Engel
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Fogg & Powers LLC
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
The present invention generally relates to systems and methods for an inertial sensor suspension that minimizes proof mass rotation and translation. The system contains a microelectromechanical sensor (MEMS) device for measuring rotation along an input rotation axis. The MEMS device includes at least one substrate, at least one proof mass, and a suspension system. The suspension system includes at least one flexure connecting the at least one proof mass to a substrate and at least one anchored suspension element with a split support beam having a first split portion and a second split portion. The first split portion and the second split portion are of curved shape.
Public/Granted literature
- US20100147073A1 SYSTEMS AND METHODS FOR AN INERTIAL SENSOR SUSPENSION THAT MINIMIZES PROOF MASS ROTATION Public/Granted day:2010-06-17
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