Invention Grant
US08146424B2 Systems and methods for an inertial sensor suspension that minimizes proof mass rotation 有权
用于惯性传感器悬架的系统和方法,其最小化了质量旋转

Systems and methods for an inertial sensor suspension that minimizes proof mass rotation
Abstract:
The present invention generally relates to systems and methods for an inertial sensor suspension that minimizes proof mass rotation and translation. The system contains a microelectromechanical sensor (MEMS) device for measuring rotation along an input rotation axis. The MEMS device includes at least one substrate, at least one proof mass, and a suspension system. The suspension system includes at least one flexure connecting the at least one proof mass to a substrate and at least one anchored suspension element with a split support beam having a first split portion and a second split portion. The first split portion and the second split portion are of curved shape.
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