Invention Grant
- Patent Title: Illumination system for optical inspection
- Patent Title (中): 光学检查照明系统
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Application No.: US13069332Application Date: 2011-03-22
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Publication No.: US08134699B2Publication Date: 2012-03-13
- Inventor: Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
- Applicant: Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
- Applicant Address: US CA Santa Clara IL Rehovot
- Assignee: Applied Materials, Inc.,Applied Materials Israel, Ltd.
- Current Assignee: Applied Materials, Inc.,Applied Materials Israel, Ltd.
- Current Assignee Address: US CA Santa Clara IL Rehovot
- Agency: SNR Denton US LLP
- Main IPC: G01N21/00
- IPC: G01N21/00
Abstract:
Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
Public/Granted literature
- US20110170090A1 ILLUMINATION SYSTEM FOR OPTICAL INSPECTION Public/Granted day:2011-07-14
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