Invention Grant
- Patent Title: Electrostatic comb actuator
- Patent Title (中): 静电梳子执行机构
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Application No.: US12638160Application Date: 2009-12-15
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Publication No.: US08134277B2Publication Date: 2012-03-13
- Inventor: Abdul Jaleel K. Moidu
- Applicant: Abdul Jaleel K. Moidu
- Agency: Teitelbaum & MacLean
- Agent Neil Teitelbaum; Doug MacLean
- Main IPC: H02N1/00
- IPC: H02N1/00

Abstract:
An electrostatic comb actuator having reduced in-plane rotation of a tiltable element is disclosed. The actuator has a stator comb electrode and a tiltable rotor comb electrode. The rotor comb electrode fingers extend from an anchor wall running parallel to the axis of rotation of the rotor at a first distance from the axis of rotation. The rotor comb electrode fingers extend towards the axis of rotation for a length that is smaller than the first distance. The stator electrodes are shifted towards the axis of rotation, so that the stator electrode fingers are only partially overlapping with the rotor electrodes fingers.
Public/Granted literature
- US20110140569A1 ELECTROSTATIC COMB ACTUATOR Public/Granted day:2011-06-16
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