Invention Grant
- Patent Title: Efficient interconnect structure for electrical fuse applications
- Patent Title (中): 电熔丝应用的高效互连结构
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Application No.: US12976445Application Date: 2010-12-22
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Publication No.: US08133767B2Publication Date: 2012-03-13
- Inventor: Chih-Chao Yang , Lynne M. Gignac , Chao-Kun Hu
- Applicant: Chih-Chao Yang , Lynne M. Gignac , Chao-Kun Hu
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Louis J. Percello, Esq.
- Main IPC: H01L21/82
- IPC: H01L21/82

Abstract:
A semiconductor structure is provided that includes an interconnect structure and a fuse structure located in different areas, yet within the same interconnect level. The interconnect structure has high electromigration resistance, while the fuse structure has a lower electromigration resistance as compared with the interconnect structure. The fuse structure includes a conductive material embedded within an interconnect dielectric in which the upper surface of the conductive material has a high concentration of oxygen present therein. A dielectric capping layer is located atop the dielectric material and the conductive material. The presence of the surface oxide layer at the interface between the conductive material and the dielectric capping layer degrades the adhesion between the conductive material and the dielectric capping layer. As such, when current is provided to the fuse structure electromigration of the conductive material occurs and over time an opening is formed in the conductive material blowing the fuse element.
Public/Granted literature
- US20110092031A1 EFFICIENT INTERCONNECT STRUCTURE FOR ELECTRICAL FUSE APPLICATIONS Public/Granted day:2011-04-21
Information query
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