Invention Grant
US08130002B2 Device and method for detecting direction of polarization of ferroelectric material 失效
检测铁电材料极化方向的装置及方法

Device and method for detecting direction of polarization of ferroelectric material
Abstract:
A device for detecting polarization direction of a ferroelectric is provided. From a measurement signal provided through a probe disposed in contact with or near the surface of a ferroelectric, a demodulation means generates a detection signal having a signal level corresponding to a capacitance change of the ferroelectric due to application of an alternating electric field to a capacitor component formed in the ferroelectric directly below the probe. A synchronous detection means performs synchronous detection of the detection signal based on a synchronous signal and generates a polarization direction detection signal corresponding to the polarization direction of the ferroelectric. A pseudo-noise signal generation means generates a pseudo-noise signal with the same frequency as that of the electric field signal and a different phase and amplitude therefrom. The demodulation means includes a noise component removal means that removes noise components in the measurement signal through signal arithmetic processing with the pseudo-noise signal.
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