Invention Grant
US08129809B2 Image sensor and manufacturing method thereof 有权
图像传感器及其制造方法

Image sensor and manufacturing method thereof
Abstract:
Disclosed are an image sensor and a manufacturing method thereof. The image sensor includes a circuit layer on a first surface of a semiconductor substrate, a metal interconnection layer on the circuit layer, trenches formed in a second surface of the semiconductor substrate along a boundary of a pixel, and a light blocking layer in the trenches. The backside illumination type image sensor according to the embodiment has a light blocking structure at a rear surface of the semiconductor substrate, thereby improving sensing efficiency while inhibiting interference between adjacent pixels.
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