Invention Grant
US08129798B2 Semiconductor device comprising fully-depleted and partially-depleted FinFETs
有权
包括完全耗尽和部分耗尽的FinFET的半导体器件
- Patent Title: Semiconductor device comprising fully-depleted and partially-depleted FinFETs
- Patent Title (中): 包括完全耗尽和部分耗尽的FinFET的半导体器件
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Application No.: US12629998Application Date: 2009-12-03
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Publication No.: US08129798B2Publication Date: 2012-03-06
- Inventor: Satoshi Inaba
- Applicant: Satoshi Inaba
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-070257 20090323
- Main IPC: H01L27/088
- IPC: H01L27/088

Abstract:
A semiconductor device includes a circuit comprising a first transistor in a first Fin; a power supply circuit in a second Fin, the power supply circuit comprising a second transistor connected between the circuit and a power supply line; and a substrate contact electrically connected to the semiconductor substrate and configured to apply a substrate voltage to a substrate, wherein a width of the first Fin in a cross-section of the first Fin perpendicular to a channel length direction of the first transistor is equal to or smaller than a twofold of a largest depletion layer width of a depletion layer formed in a channel part of the first transistor, and a width of the second Fin in a cross-section of the second Fin perpendicular to a channel length direction of the second transistor is larger than a twofold of a largest depletion layer width of a depletion layer in a channel of the second transistor.
Public/Granted literature
- US20100237436A1 SEMICONDUCTOR DEVICE Public/Granted day:2010-09-23
Information query
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