Invention Grant
US08129798B2 Semiconductor device comprising fully-depleted and partially-depleted FinFETs 有权
包括完全耗尽和部分耗尽的FinFET的半导体器件

Semiconductor device comprising fully-depleted and partially-depleted FinFETs
Abstract:
A semiconductor device includes a circuit comprising a first transistor in a first Fin; a power supply circuit in a second Fin, the power supply circuit comprising a second transistor connected between the circuit and a power supply line; and a substrate contact electrically connected to the semiconductor substrate and configured to apply a substrate voltage to a substrate, wherein a width of the first Fin in a cross-section of the first Fin perpendicular to a channel length direction of the first transistor is equal to or smaller than a twofold of a largest depletion layer width of a depletion layer formed in a channel part of the first transistor, and a width of the second Fin in a cross-section of the second Fin perpendicular to a channel length direction of the second transistor is larger than a twofold of a largest depletion layer width of a depletion layer in a channel of the second transistor.
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