Invention Grant
- Patent Title: Semiconductor memory device comprising shifted contact plugs
- Patent Title (中): 半导体存储器件包括位移接触插塞
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Application No.: US12563006Application Date: 2009-09-18
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Publication No.: US08129766B2Publication Date: 2012-03-06
- Inventor: Susumu Shuto
- Applicant: Susumu Shuto
- Applicant Address: JP
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: JP2009-171040 20090722
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
A memory includes first contact plugs; ferroelectric capacitors above the first contact plugs; second contact plugs in a first interlayer film being below an area which is between two adjacent ferroelectric capacitors, the second contact plug; first interconnections connected to the second contact plugs, the first interconnections extending in a first direction substantially perpendicular to an arrangement direction, in which the two ferroelectric capacitors are arranged, on the first interlayer film; a second interlayer film above the first interlayer film and the first interconnection; third contact plugs in the second interlayer film, the third contact plugs being respectively connected to the first interconnections at positions shifted from the second contact plugs in the first direction; and second interconnections electrically connecting the third contact plug to the upper electrodes of the two ferroelectric capacitors.
Public/Granted literature
- US20110018043A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2011-01-27
Information query
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