Invention Grant
- Patent Title: Semiconductor integrated circuit device
- Patent Title (中): 半导体集成电路器件
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Application No.: US12487492Application Date: 2009-06-18
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Publication No.: US08129707B2Publication Date: 2012-03-06
- Inventor: Norikatsu Takaura , Hideyuki Matsuoka , Motoyasu Terao , Kenzo Kurotsuchi , Tsuyoshi Yamauchi
- Applicant: Norikatsu Takaura , Hideyuki Matsuoka , Motoyasu Terao , Kenzo Kurotsuchi , Tsuyoshi Yamauchi
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Hitachi, Ltd.,Hitachi ULSI Systems Co., Ltd.
- Current Assignee: Hitachi, Ltd.,Hitachi ULSI Systems Co., Ltd.
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: JPP2003-145305 20030522
- Main IPC: H01L47/00
- IPC: H01L47/00

Abstract:
With a high-speed nonvolatile phase change memory, reliability in respect of the number of refresh times is enhanced. In a memory cell forming area of a phase change memory using a MISFET as a transistor for selection of memory cells, a phase change material layer of a memory cell comprising a resistor element, using a phase change material, is formed for common use. As a result, variation in shape and a change in composition of the phase change material, caused by isolation of memory cell elements by etching, are reduced, thereby enhancing reliability of memory cells, in respect of the number of refresh times.
Public/Granted literature
- US20090250680A1 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE Public/Granted day:2009-10-08
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