Invention Grant
US08129086B2 Polymerizable compound, polymer, positive resist composition, and patterning process using the same 有权
可聚合化合物,聚合物,正性抗蚀剂组合物和使用其的图案化工艺

Polymerizable compound, polymer, positive resist composition, and patterning process using the same
Abstract:
A polymer suitable as a base resin for a positive resist composition, in particular a chemically amplified positive resist composition, having a higher resolution, a larger exposure allowance, a smaller sparse-dense size difference, a better process applicability, a better pattern configuration after exposure, and in addition, a further excellent etching resistance, than a conventional positive resist. A positive resist composition using the same, a patterning process, and a novel polymerizable compound to obtain the polymer. A polymer has a hydrogen atom of at least a carboxyl group is substituted by an acid labile group represented by the following general formula (2), a positive resist composition using the same, a patterning process, and a novel polymerizable compound to obtain a polymer like this.
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