Invention Grant
US08129086B2 Polymerizable compound, polymer, positive resist composition, and patterning process using the same
有权
可聚合化合物,聚合物,正性抗蚀剂组合物和使用其的图案化工艺
- Patent Title: Polymerizable compound, polymer, positive resist composition, and patterning process using the same
- Patent Title (中): 可聚合化合物,聚合物,正性抗蚀剂组合物和使用其的图案化工艺
-
Application No.: US12453665Application Date: 2009-05-18
-
Publication No.: US08129086B2Publication Date: 2012-03-06
- Inventor: Jun Hatakeyama , Takeru Watanabe , Seiichiro Tachibana
- Applicant: Jun Hatakeyama , Takeru Watanabe , Seiichiro Tachibana
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2008-146205 20080603
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; G03F7/40 ; C08F32/00 ; C08F20/10

Abstract:
A polymer suitable as a base resin for a positive resist composition, in particular a chemically amplified positive resist composition, having a higher resolution, a larger exposure allowance, a smaller sparse-dense size difference, a better process applicability, a better pattern configuration after exposure, and in addition, a further excellent etching resistance, than a conventional positive resist. A positive resist composition using the same, a patterning process, and a novel polymerizable compound to obtain the polymer. A polymer has a hydrogen atom of at least a carboxyl group is substituted by an acid labile group represented by the following general formula (2), a positive resist composition using the same, a patterning process, and a novel polymerizable compound to obtain a polymer like this.
Public/Granted literature
- US20090297979A1 Polymerizable compound, polymer, positive resist composition, and patterning process using the same Public/Granted day:2009-12-03
Information query