Invention Grant
US08128282B2 Microsystem component with a device deformable under the effect of temperature changes
有权
具有可在温度变化影响下变形的器件的微系统元件
- Patent Title: Microsystem component with a device deformable under the effect of temperature changes
- Patent Title (中): 具有可在温度变化影响下变形的器件的微系统元件
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Application No.: US11813308Application Date: 2006-01-04
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Publication No.: US08128282B2Publication Date: 2012-03-06
- Inventor: Ivo Rangelow , Tzvetan Ivanov , Katerina Ivanova
- Applicant: Ivo Rangelow , Tzvetan Ivanov , Katerina Ivanova
- Applicant Address: DE Kassel
- Assignee: Universitaet Kassel
- Current Assignee: Universitaet Kassel
- Current Assignee Address: DE Kassel
- Agent Michael J. Striker
- Priority: DE102005001116 20050105
- International Application: PCT/DE2006/000016 WO 20060104
- International Announcement: WO2006/072237 WO 20060713
- Main IPC: G01K5/62
- IPC: G01K5/62

Abstract:
A microsystem component with a device (3) deformable under the influence of temperature changes is disclosed. The device comprises at least one first (4, 5) and second (8) element with differing thermal expansion coefficients and different thermal conductivities. The elements (4, 5; 8) are physically separate and arranged and connected to each other such that the device (3) assumes flexure states which are dependent on the temperature.
Public/Granted literature
- US20090213900A1 MICROSYSTEM COMPONENT WITH A DEVICE DEFORMABLE UNDER THE EFFECT OF TEMPERATURE CHANGES Public/Granted day:2009-08-27
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