Invention Grant
US08120376B2 Fault detection apparatuses and methods for fault detection of semiconductor processing tools
有权
用于半导体处理工具故障检测的故障检测装置和方法
- Patent Title: Fault detection apparatuses and methods for fault detection of semiconductor processing tools
- Patent Title (中): 用于半导体处理工具故障检测的故障检测装置和方法
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Application No.: US11955148Application Date: 2007-12-12
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Publication No.: US08120376B2Publication Date: 2012-02-21
- Inventor: Keith John Hansen
- Applicant: Keith John Hansen
- Applicant Address: US CA San Jose
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/26
Abstract:
Fault detection apparatuses and methods for detecting a processing or hardware performance fault of a semiconductor production tool have been provided. In an exemplary embodiment, a method for detecting a fault of a semiconductor production tool includes sensing a signal associated with a test component of the production tool during operation of the production tool and converting the signal to an electronic test signal. A prerecorded signature signal corresponding to the test component is provided and the test signal and the prerecorded signature signal are compared.
Public/Granted literature
- US20090153144A1 FAULT DETECTION APPARATUSES AND METHODS FOR FAULT DETECTION OF SEMICONDUCTOR PROCESSING TOOLS Public/Granted day:2009-06-18
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