Invention Grant
- Patent Title: Semiconductor constructions and methods of forming layers
- Patent Title (中): 半导体结构和形成层的方法
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Application No.: US12787202Application Date: 2010-05-25
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Publication No.: US08120184B2Publication Date: 2012-02-21
- Inventor: John Smythe
- Applicant: John Smythe
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John, P.S.
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
The invention includes methods of forming layers conformally over undulating surface topographies associated with semiconductor substrates. The undulating surface topographies can first be exposed to one or more of titanium oxide, neodymium oxide, yttrium oxide, zirconium oxide and vanadium oxide to treat the surfaces, and can be subsequently exposed to a material that forms a layer conformally along the treated surfaces. The material can, for example, comprise one or both of aluminum silane and aluminum silazane. The invention also includes semiconductor constructions having conformal layers formed over liners containing one or more of titanium oxide, yttrium oxide, zirconium oxide and vanadium oxide.
Public/Granted literature
- US20100230813A1 Semiconductor Constructions and Methods of Forming Layers Public/Granted day:2010-09-16
Information query
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