Invention Grant
- Patent Title: Image sensor and manufacturing method of image sensor
- Patent Title (中): 图像传感器和图像传感器的制造方法
-
Application No.: US12575338Application Date: 2009-10-07
-
Publication No.: US08120080B2Publication Date: 2012-02-21
- Inventor: Jeong-Su Park
- Applicant: Jeong-Su Park
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Sherr & Vaughn, PLLC
- Priority: KR10-2008-0133662 20081224
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L31/113 ; H01L27/148 ; H01L29/768 ; H01L31/06 ; H01L31/00

Abstract:
An image sensor includes a trench formed in a semiconductor substrate, a first reflection part formed in the trench and having an inclined, curved surface, a second reflection part formed on the first reflection part such that a remaining space of the trench is filled with the second reflection part, and a vertical type photodiode formed on a region of the substrate between trenches. A method for forming the image sensor includes forming a trench in a semiconductor substrate, forming a first reflection part having an inclined, curved surface in the trench, forming a second reflection part on the first reflection part such that a remaining space of the trench is filled with the second reflection part, and forming a vertical type photodiode on a region of the substrate between trenches.
Public/Granted literature
- US20100155872A1 IMAGE SENSOR AND MANUFACTURING METHOD OF IMAGE SENSOR Public/Granted day:2010-06-24
Information query
IPC分类: