Invention Grant
- Patent Title: Methods and apparatus for statistical characterization of nano-particles
- Patent Title (中): 纳米颗粒统计学表征的方法和装置
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Application No.: US12463285Application Date: 2009-05-08
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Publication No.: US08119985B2Publication Date: 2012-02-21
- Inventor: Diane K. Stewart , Daniel Rosenthal , Michel Epsztein
- Applicant: Diane K. Stewart , Daniel Rosenthal , Michel Epsztein
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Griner, LLP
- Agent Michael O. Scheinberg; Robert Amedeo
- Main IPC: G01N23/05
- IPC: G01N23/05
Abstract:
A method and apparatus for determining statistical characteristics of nano-particles includes distributing the nano-particles over a surface and then determining properties of the nano-particles by automatic measurement of multiple particles or by a measurement that determines properties of multiple particles at one time, without manipulating individual nano-particles.
Public/Granted literature
- US20090326866A1 Methods and Apparatus for Statistical Characterization of Nano-Particles Public/Granted day:2009-12-31
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