Invention Grant
- Patent Title: Methods for starting and operating a thermal abatement system
- Patent Title (中): 启动和运行热消减系统的方法
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Application No.: US12257888Application Date: 2008-10-24
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Publication No.: US08095240B2Publication Date: 2012-01-10
- Inventor: Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
- Applicant: Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: B01J19/00
- IPC: B01J19/00 ; G05B21/00
Abstract:
A flame sensor apparatus for use with a flame heated thermal abatement reactor is provided, including a flame sensor adapted to sense a flame within the thermal abatement reactor; and a shutter adapted to selectively block the transmission of radiation from the flame to the flame sensor.
Public/Granted literature
- US20090098492A1 METHODS AND APPARATUS FOR STARTING AND OPERATING A THERMAL ABATEMENT SYSTEM Public/Granted day:2009-04-16
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