Invention Grant
- Patent Title: Piezoelectric resonator, piezoelectric oscillator, electronic device and method for manufacturing piezoelectric resonator
- Patent Title (中): 压电谐振器,压电振荡器,电子器件及制造压电谐振器的方法
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Application No.: US12722831Application Date: 2010-03-12
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Publication No.: US08093785B2Publication Date: 2012-01-10
- Inventor: Mitsuhiro Wada
- Applicant: Mitsuhiro Wada
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2009-076055 20090326
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
A piezoelectric resonator includes: a package having a cavity; a plurality of electrode pads formed within the cavity; a first bonding section and a second bonding section that include silicone base conductive adhesive and are formed on the plurality of the electrode pads, respectively; and a piezoelectric vibrating element having one end supported by the first bonding section and the second bonding section, wherein the piezoelectric vibrating element has a piezoelectric substrate having mutually opposing first face and second face, a first electrode that is formed on the first face and electrically connected to the first bonding section, and a second electrode that is formed on the second face and electrically connected to the second bonding section, wherein an area of the piezoelectric vibrating element supported by the first bonding section and the second bonding section defines a supported region and an area of the piezoelectric vibrating element that is not supported by the first bonding section or the second bonding section defines a movable region, wherein a fluorocarbon resin film is formed on the movable region.
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