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US08093645B2 Non-volatile semiconductor memory device 有权
非易失性半导体存储器件

Non-volatile semiconductor memory device
Abstract:
A non-volatile semiconductor memory device includes a plurality of memory cell regions including a plurality of bit lines, a plurality of word lines intersecting the plurality of bit lines, and a first insulating film formed in a region between any two adjacent bit lines, a bit line contact region including bit line contacts connected to the plurality of bit lines, a first UV light shielding film covering at least a portion of the semiconductor substrate in the bit line contact region, an interlayer insulating film, and a second UV light shielding film covering the plurality of memory cell regions. The first UV light shielding film effectively reduces or blocks UV light generated during a fabrication step.
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