Invention Grant
- Patent Title: Non-volatile semiconductor memory device
- Patent Title (中): 非易失性半导体存储器件
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Application No.: US12715916Application Date: 2010-03-02
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Publication No.: US08093645B2Publication Date: 2012-01-10
- Inventor: Yukihiro Yamashita
- Applicant: Yukihiro Yamashita
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2009-056872 20090310
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A non-volatile semiconductor memory device includes a plurality of memory cell regions including a plurality of bit lines, a plurality of word lines intersecting the plurality of bit lines, and a first insulating film formed in a region between any two adjacent bit lines, a bit line contact region including bit line contacts connected to the plurality of bit lines, a first UV light shielding film covering at least a portion of the semiconductor substrate in the bit line contact region, an interlayer insulating film, and a second UV light shielding film covering the plurality of memory cell regions. The first UV light shielding film effectively reduces or blocks UV light generated during a fabrication step.
Public/Granted literature
- US20100230742A1 NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2010-09-16
Information query
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