Invention Grant
- Patent Title: Ion beam stabilization
- Patent Title (中): 离子束稳定
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Application No.: US12548764Application Date: 2009-08-27
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Publication No.: US08093563B2Publication Date: 2012-01-10
- Inventor: FHM-Faridur Rahman , Louis S. Farkas, III , John A. Notte, IV
- Applicant: FHM-Faridur Rahman , Louis S. Farkas, III , John A. Notte, IV
- Applicant Address: US MA Peabody
- Assignee: Carl Zeiss NTS, LLC
- Current Assignee: Carl Zeiss NTS, LLC
- Current Assignee Address: US MA Peabody
- Agency: Fish & Richardson P.C.
- Main IPC: H01J3/14
- IPC: H01J3/14
Abstract:
Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
Public/Granted literature
- US20100051805A1 ION BEAM STABILIZATION Public/Granted day:2010-03-04
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