A system that characterizes an integrated circuit manufacturing process is presented. During operation, the system receives a layout which includes a plurality of test structures for semiconductor devices, wherein each test structure varies one or more design variables. The system then fabricates a plurality of wafers based on the layout, wherein each wafer in the plurality of wafers is fabricated using one of a plurality of process settings. Next, the system obtains performance characteristics for the plurality of test structures on the plurality of wafers. The system then generates a process model that is based on at least the effect that values for the one or more design variables and the plurality of process settings have on the performance characteristics of the plurality of test structures.