Invention Grant
- Patent Title: Array element device control method and apparatus
- Patent Title (中): 阵列元件装置控制方法及装置
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Application No.: US12318034Application Date: 2008-12-19
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Publication No.: US08089672B2Publication Date: 2012-01-03
- Inventor: Patricius Aloysius Jacobus Tinnemans , Heine Melle Mulder , Marius Ravensbergen , Wilfred Edward Endendijk , Jozef Ferdinand Dymphna Verbeeck
- Applicant: Patricius Aloysius Jacobus Tinnemans , Heine Melle Mulder , Marius Ravensbergen , Wilfred Edward Endendijk , Jozef Ferdinand Dymphna Verbeeck
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G02B26/08
- IPC: G02B26/08
Abstract:
A method of controlling an element of an array of individually controllable elements. The method includes varying a frequency of a driving voltage with which the element is driven.
Public/Granted literature
- US20090190197A1 Device control method and apparatus Public/Granted day:2009-07-30
Information query
