Invention Grant
- Patent Title: Displacement measurement system and method thereof
- Patent Title (中): 位移测量系统及其方法
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Application No.: US12483263Application Date: 2009-06-12
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Publication No.: US08089631B2Publication Date: 2012-01-03
- Inventor: Kuei-Chu Hsu , Chii-Chang Chen , Chia-Hua Chan , Yin-Chieh Lai
- Applicant: Kuei-Chu Hsu , Chii-Chang Chen , Chia-Hua Chan , Yin-Chieh Lai
- Applicant Address: TW Hsinchu
- Assignee: National Chiao Tung University
- Current Assignee: National Chiao Tung University
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW98115384A 20090508
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
A displacement measurement system including a coherent light source, a two-dimensional grating, a photo sensor, and a signal processing apparatus is provided. After the coherent light beam enters the two-dimensional grating, a zero-order light beam and a plurality of first-order diffraction beams are generated. The zero-order light beam interferes with two of the first-order beams in different directions, so that corresponding interference fringes are formed on the photo sensor. Accordingly, when the two-dimensional grating moves, displacements of the two-dimensional grating in the different directions are obtained by calculating phase differences of the interference fringes in the corresponding directions. Besides, when the two-dimensional grating rotates, the rotational angle of the two-dimensional grating is obtained from the corresponding rotational angle of a diffraction pattern of the first-order diffraction beams.
Public/Granted literature
- US20100284022A1 DISPLACEMENT MEASUREMENT SYSTEM AND METHOD THEREOF Public/Granted day:2010-11-11
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