Invention Grant
US08089294B2 MEMS probe fabrication on a reusable substrate for probe card application
有权
用于探针卡应用的可重复使用的基板上的MEMS探针制造
- Patent Title: MEMS probe fabrication on a reusable substrate for probe card application
- Patent Title (中): 用于探针卡应用的可重复使用的基板上的MEMS探针制造
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Application No.: US12186458Application Date: 2008-08-05
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Publication No.: US08089294B2Publication Date: 2012-01-03
- Inventor: Tseng-Yang Hsu , Cao Ngoc Lam
- Applicant: Tseng-Yang Hsu , Cao Ngoc Lam
- Applicant Address: TW Taipei
- Assignee: WinMENS Technologies Co., Ltd.
- Current Assignee: WinMENS Technologies Co., Ltd.
- Current Assignee Address: TW Taipei
- Agency: Blakely, Sokoloff, Taylor & Zafman
- Main IPC: G01R31/26
- IPC: G01R31/26
Abstract:
A Micro-Electro-Mechanical-Systems (MEMS) probe is fabricated on a substrate for use in a probe card. The probe has a bonding surface to be attached to an application platform of the probe card. The bonding surface is formed on a plane perpendicular to a surface of the substrate. An undercut is formed beneath the probe for detachment of the probe from the substrate.
Public/Granted literature
- US20100033201A1 MEMS PROBE FABRICATION ON A REUSABLE SUBSTRATE FOR PROBE CARD APPLICATION Public/Granted day:2010-02-11
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