Invention Grant
US08089202B2 Piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic device, radio-controlled clock, and method for manufacturing piezoelectric vibrating reed 有权
压电振动片,压电振动器,振荡器,电子器件,无线电控制时钟及压电振动片制造方法

Piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic device, radio-controlled clock, and method for manufacturing piezoelectric vibrating reed
Abstract:
Providing a piezoelectric vibrating reed which has low disconnection possibility and ensures reliability for stable operation without requiring strict exposure position accuracy. A piezoelectric vibrating reed 1 including: a piezoelectric plate which includes vibrating arms 3 and 4, a base portion 5 to which base ends of vibrating arms are integrally fixed, and groove portions 6 which are formed on principal surfaces of vibrating arms; and excitation electrodes 10 and 11 to which vibrating arms are vibrate, wherein the excitation electrodes each include: a principal electrode portion 20, a side electrode portion 21 and a connection electrode portion 22, wherein the principal electrode portions are formed such that a horizontal width W1 on the base end sides of the vibrating arms is smaller than a horizontal width W2 in other portions so that a vacant area S is secured on a portion of the principal surface of each of the vibrating arms in the vicinity of a fork portion 15, and wherein the connection electrode portion is formed to have a large width on the principal surface of each of the vibrating arms so as to come close to an opening end side of each of the groove portions by occupying the vacant area.
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