Invention Grant
US08088553B2 Positive resist composition, method of forming resist pattern, and polymeric compound
有权
正型抗蚀剂组合物,形成抗蚀剂图案的方法和聚合物
- Patent Title: Positive resist composition, method of forming resist pattern, and polymeric compound
- Patent Title (中): 正型抗蚀剂组合物,形成抗蚀剂图案的方法和聚合物
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Application No.: US12425706Application Date: 2009-04-17
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Publication No.: US08088553B2Publication Date: 2012-01-03
- Inventor: Hiroaki Shimizu , Tsuyoshi Nakamura , Takayoshi Mori , Sanae Furuya , Daiju Shiono , Tomoyuki Hirano , Takahiro Dazai
- Applicant: Hiroaki Shimizu , Tsuyoshi Nakamura , Takayoshi Mori , Sanae Furuya , Daiju Shiono , Tomoyuki Hirano , Takahiro Dazai
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2008-114190 20080424
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20 ; G03F7/30 ; C08F220/28

Abstract:
A positive resist composition including a base component (A) which exhibits increased solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the base component (A) including a polymeric compound (A1) having a structural unit (a0-1) represented by general formula (a0-1) (wherein R1 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; R8 represents a divalent linking group; and R7 represents an acid dissociable, dissolution inhibiting group) and a structural unit (a0-2) represented by general formula (a0-2) (wherein R3 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; R4 represents a branched alkyl group of 3 or more carbon atoms; and each of R5 and R6 independently represents an alkyl group, wherein R5 and R6 are mutually bonded to form a ring).
Public/Granted literature
- US20090269694A1 POSITIVE RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, AND POLYMERIC COMPOUND Public/Granted day:2009-10-29
Information query
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