Invention Grant
- Patent Title: Laser-based method for making field emission cathode
- Patent Title (中): 用于制造场致发射阴极的基于激光的方法
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Application No.: US11982486Application Date: 2007-11-02
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Publication No.: US08088454B2Publication Date: 2012-01-03
- Inventor: Zhuo Chen , Chun-Xiang Luo , Kai-Li Jiang , Shou-Shan Fan
- Applicant: Zhuo Chen , Chun-Xiang Luo , Kai-Li Jiang , Shou-Shan Fan
- Applicant Address: CN Beijing TW Tu-Cheng, New Taipei
- Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee Address: CN Beijing TW Tu-Cheng, New Taipei
- Agency: Altis Law Group, Inc.
- Priority: CN200610157894 20061222
- Main IPC: B05D3/00
- IPC: B05D3/00

Abstract:
A method for making a field emission cathode includes the steps of: (a) providing a substrate having a first substrate surface and a second substrate surface opposite to the first substrate surface; (b) forming a conductive film on the first substrate surface; (c) forming a light absorption layer on the conductive film; (d) forming a catalyst film on the light absorption layer; (e) flowing a mixture of a carrier gas and a carbon source gas over the catalyst film; (f) focusing a laser beam on the catalyst film and/or on the second substrate surface to locally heat the catalyst to a predetermined reaction temperature; and (g) growing an array of the carbon nanotubes via the catalyst film to form a field emission cathode.
Public/Granted literature
- US20080220686A1 Laser-based method for making field emission cathode Public/Granted day:2008-09-11
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