Invention Grant
US08087151B2 Gas sensor having zinc oxide nano-structures and method of fabricating the same
有权
具有氧化锌纳米结构的气体传感器及其制造方法
- Patent Title: Gas sensor having zinc oxide nano-structures and method of fabricating the same
- Patent Title (中): 具有氧化锌纳米结构的气体传感器及其制造方法
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Application No.: US12373908Application Date: 2007-04-03
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Publication No.: US08087151B2Publication Date: 2012-01-03
- Inventor: Rae-Man Park , Sang-Hyeob Kim , Jonghyurk Park , Sunglyul Maeng
- Applicant: Rae-Man Park , Sang-Hyeob Kim , Jonghyurk Park , Sunglyul Maeng
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2006-0067095 20060718
- International Application: PCT/KR2007/001619 WO 20070403
- International Announcement: WO2008/010638 WO 20080124
- Main IPC: G01N27/12
- IPC: G01N27/12

Abstract:
A gas sensor includes zinc oxide nano-structures formed on a substrate, a plurality of metal islands coated on a surface of each zinc oxide nano-structure and separated from one another, a first electrode electrically connected to one end of each zinc oxide nano-structure through the substrate, a second electrode electrically connected to the other end of each zinc oxide nano-structure, and a current variation-measuring unit electrically connected to each of the first electrode and the second electrode so as to measure a variation in the amount of current flowing between the first electrode and the second electrode. In order to form the plurality of metal islands on the zinc oxide nano-structures, a solution of metal components of a metal material is coated on the surface of each zinc oxide nano-structure.
Public/Granted literature
- US20100012919A1 GAS SENSOR HAVING ZINC OXIDE NANO-STRUCTURES AND METHOD OF FABRICATING THE SAME Public/Granted day:2010-01-21
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