Invention Grant
US07991033B2 Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus 有权
垂直腔面发射激光器(VCSEL),VCSEL阵列器件,光学扫描设备和成像设备

  • Patent Title: Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus
  • Patent Title (中): 垂直腔面发射激光器(VCSEL),VCSEL阵列器件,光学扫描设备和成像设备
  • Application No.: US12476689
    Application Date: 2009-06-02
  • Publication No.: US07991033B2
    Publication Date: 2011-08-02
  • Inventor: Kei HaraMorimasa Kaminishi
  • Applicant: Kei HaraMorimasa Kaminishi
  • Applicant Address: JP Tokyo
  • Assignee: Ricoh Company, Ltd.
  • Current Assignee: Ricoh Company, Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: Cooper & Dunham LLP
  • Priority: JP2008-146000 20080603; JP2008-165106 20080624; JP2009-098363 20090414; JP2009-098364 20090414
  • Main IPC: H01S3/04
  • IPC: H01S3/04 H01S5/00
Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus
Abstract:
A vertical cavity surface emitting laser (VCSEL) includes a semiconductor substrate, a lower reflecting mirror formed on the semiconductor substrate, and a mesa structure. The mesa structure includes an active layer, a selective oxidization layer that includes a current confined structure, and an upper reflecting mirror. A lower electrode is connected to the semiconductor substrate, and an upper electrode is connected to the upper reflecting mirror. The VCSEL emits laser light perpendicularly to the plane of the semiconductor substrate when an electric current flows between the upper electrode and the lower electrode. The semiconductor substrate is inclined with respect to (100) plane. The active layer includes a quantum well layer having a compressive strain with respect to the substrate, and a spacer layer. The spacer layer has either a compressive strain or a tensile strain with respect to the semiconductor substrate.
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