Invention Grant
US07990676B2 Density-conforming vertical plate capacitors exhibiting enhanced capacitance and methods of fabricating the same 有权
具有增强电容的密度依赖性垂直板电容器及其制造方法

Density-conforming vertical plate capacitors exhibiting enhanced capacitance and methods of fabricating the same
Abstract:
Density-conforming vertical plate capacitors exhibiting enhanced capacitance and methods for fabricating density-conforming vertical plate capacitors exhibiting enhanced capacitance are provided. An embodiment of the density-conforming vertical plate capacitor comprises a first conductive interconnect and a second conductive interconnect. The second conductive interconnect overlies the first conductive interconnect and is substantially aligned with the first conductive interconnect. A via bar electrically couples the first conductive interconnect and the second conductive interconnect. The via bar has a width and a length that is larger than the width and contributes to the capacitance of the vertical plate capacitor.
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