Invention Grant
US07990622B2 Projection objective of a microlithographic projection exposure apparatus 有权
微光刻投影曝光装置的投影目标

Projection objective of a microlithographic projection exposure apparatus
Abstract:
A projection objective of a microlithographic projection exposure apparatus comprises a manipulator for reducing rotationally asymmetric image errors. The manipulator in turn contains a lens, an optical element and an interspace formed between the lens and the optical element, which can be filled with a liquid. At least one actuator acting exclusively on the lens is furthermore provided, which can generate a rotationally asymmetric deformation of the lens.
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